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Low pressure drop large flow rate Mass Flow Meter

MODEL HFM-200W/LS SERIES

■Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
■Flow range：1500～15000SLM
■Accuracy：±3～5%F.S.

  • Control of large flows available up to F.S.15,000SLM by N₂ conversion.