PRODUCTS
Low pressure drop large flow rate Mass Flow Meter
MODEL HFM-200W/LS SERIES
■Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
■Flow range：1500～15000SLM
■Accuracy：±3～5%F.S.
- Control of large flows available up to F.S.15,000SLM by N₂ conversion.
