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Standard Mass Flow Controller

MODEL 3660 SERIES

■Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
■Range of maximum flow rate：(N₂)10SCCM～100SLM
■Accuracy：±1～1.5%F.S.

  • Capable of wide flow range  from F.S.10SCCM to F.S.100SLM by N₂ conversion.
  • CE