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High-grade Mass Flow Meter

MODEL 3100 SERIES

■Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
■Flow range：1SCCM～20SLM
■Accuracy：±1%F.S.

  • Measurement of minute flows available from F.S.1SCCM by N₂ conversion.