PRODUCTS
All Metal Digital MFC / MFM
MODEL EX-550 SERIES
■Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
■Flow range：10SCCM～5SLM
■Accuracy：±1%S.P.(25～100%F.S.)
±0.25%F.S.(～25%F.S.)
- Metal seals.
- High accuracy(±1% S.P.),Fast response ≦1 sec in all range.
- Change of gas type by rotary-switch.
- RS485 communication.
- 0-5VDC or 4-20mA Input/output signal and +/-15VDC or 24VDC power supply.
- CE
