PRODUCTS

All Metal Digital MFC / MFM

MODEL EX-550 SERIES

■Applicable gas:N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
■Flow range:10SCCM~5SLM
■Accuracy:±1%S.P.(25~100%F.S.)
     ±0.25%F.S.(~25%F.S.)

  • Metal seals.
  • High accuracy(±1% S.P.),Fast response ≦1 sec in all range.
  • Change of gas type by rotary-switch.
  • RS485 communication.
  • 0-5VDC or 4-20mA Input/output signal and +/-15VDC or 24VDC power supply. 
  • CE