MG/MR Function Compact Digital Mass Flow Controller
MODEL EX-201S SERIES

• Catalog
• Manual

PI Mass Flow Controller
MODEL ST-500 SERIES

• Catalog
• Manual
• Drawing
• CAD

Digital Mass Flow Meter with Display
EXE-FLOW™ MODEL EX-700R SERIES

• Catalog
• Drawing
• Manual
• CAD

Compact Digital MFC / MFM
MODEL EX-250S SERIES

• Catalog
• Drawing
• Manual
• CAD
• Catalog (DEU)

All Metal Digital MFC / MFM
MODEL EX-550 SERIES

• Catalog
• Drawing
• Manual
• CAD

Digital MFC / MFM with Display
MODEL 8700 SERIES

• Catalog
• Drawing
• Manual
• CAD

Standard Mass Flow Controller
MODEL 3660 SERIES

• Catalog
• Drawing
• Manual
• CAD

Standard Mass Flow Meter
MODEL 3760 SERIES

• Catalog
• Drawing
• Manual
• CAD

High-grade Mass Flow Controller
MODEL 3200 SERIES

• Catalog
• Drawing
• Manual
• CAD

High-grade Mass Flow Meter
MODEL 3100 SERIES

• Catalog
• Drawing
• Manual
• CAD

High Grade Metal Seal Mass Flow Controller
MODEL 5100 SERIES

• Catalog
• Drawing
• Manual
• CAD

Metal Sealed Mass Flow Meter
MODEL 5410 SERIES

• Catalog
• Drawing
• Manual
• CAD

Low-cost Mass Flow Meter with Display
MODEL 3810DSII SERIES

• Catalog
• Drawing
• CAD
• Manual

Low-cost Mass Flow Sensor
MODEL 3810S SERIES

• Catalog
• Drawing
• Manual
• CAD

Large flow rate Mass Flow Controller
MODEL HFC-303 SERIES

• Catalog
• Drawing
• Manual
• CAD

Large flow rate Mass Flow Meter
MODEL HFM-301 SERIES

• Catalog
• Drawing
• Manual
• CAD

Low pressure drop large flow rate Mass Flow Meter
MODEL HFM-200W/LS SERIES

• Catalog
• Drawing
• Manual

Handy Mass Flow Control/Measuring Unit
FLOW COMPO™

• Catalog
• Drawing
• CAD

Compact Readout Unit
MODEL CR-400B

• Catalog
• Drawing
• Manual
• CAD

Flow Setting Device
MODEL CK SERIES

• Drawing
• CAD

Flow Indicators
MODEL DPM-3

• Drawing
• Manual
• CAD

Power Supply for Mass Flow Controller/Mass Flow Meter
MODEL PSK-FB SERIES

• Catalog
• Drawing
• Manual
• CAD

AC Adapter for Mass Flow Controller / Mass Flow Meter
PSK-83CE/PSK-85CE/PSK-38DSⅡ

• Catalog