PRODUCTS
Large flow rate Mass Flow Controller
MODEL HFC-303 SERIES
■Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
■Flow range：100～1000SLM
■Accuracy：±1%F.S.
- Control of large flows available up to F.S.1000SLM by N₂ conversion.
