PRODUCTS
PI Mass Flow Controller
MODEL ST-500 SERIES
■Applicable gas：Gas
■Flow range：Gas 10SCCM～30SLM
■Accuracy：±1%S.P.(10～100%F.S.) ±0.1%F.S.(2～10%F.S.)
- PI … Pressure Insensitive(ST-500 only)
Stable control of the gas flow without effect by pressure fluctuations. - Metal seal
- DeviceNet® EtherCAT® RS485(ST-550 only) communication
- IGS W-seal joint
- S.P. accuracy
- Responses in 1 sec in the full range of flow control
- Multi-range function using a dedicated app(30～100%F.S.)
