PRODUCTS
MG/MR Function Compact Digital Mass Flow Controller
MODEL EX-201S SERIES
■Applicable gas：N2(Air,H2,He,Ar,O2,CO2,CH4/C.F. input)
■Full-scale flow rate：Gas 10/30/50/100/300/500SCCM 1/3/5/10SLM
■Accuracy：±1%S.P.(＞35%F.S.) ±0.1%F.S.(≦35%F.S.)
- Multi Gas Multi Range
- Compact design
- S.P. accuracy and 1sec response
- RS485 communication function
- Analog input / output selectable from 0 to 5VDC or 4 to 20mA
- Power supply selectable from ±15VDC or 24VDC
- CE
