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Flow Instruments
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High Grade Metal Seal Mass Flow Controller
MODEL 5100 SERIES
Catalog
Drawing
Instruction Manual
CAD
Metal Sealed Mass Flow Meter
MODEL 5410 SERIES
Catalog
Drawing
Instruction Manual
CAD
Low-cost Mass Flow Meter with Display
MODEL 3810DSII SERIES
Catalog
Drawing
Instruction Manual
CAD (without valves)
CAD (with valve)
Low-cost Mass Flow Sensor
MODEL 3810S SERIES
Catalog
Drawing
Instruction Manual
CAD (~2SLM)
CAD (~50SLM)
Large flow rate Mass Flow Controller
MODEL HFC-303 SERIES
Catalog
Drawing
Instruction Manual
CAD (~300SLM)
CAD (~1000SLM)
Large flow rate Mass Flow Meter
MODEL HFM-301 SERIES
Catalog
Drawing
Instruction Manual
CAD (~300SLM)
CAD (~1000SLM)
Low pressure drop large flow rate Mass Flow Meter
MODEL HFM-200W/LS SERIES
Catalog
Drawing
Instruction Manual
CAD(Please contact us)
Handy Mass Flow Control/Measuring Unit
FLOW COMPO™
Catalog
Drawing
CAD
Compact Readout Unit
MODEL CR-400B
Catalog
Drawing
Instruction Manual
CAD
Flow Setting Device
MODEL CK SERIES
Drawing
CAD (CK-1A)
CAD (CK-2A)
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