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High Grade Metal Seal Mass Flow Controller MODEL 5100 SERIES

High Grade Metal Seal Mass Flow Controller

Model 5100 Series Mass Flow Controller/Meter features weldless structure, metal seals, accurac y of ≤±1%, re-sponse of ≤±1 second and other basic performance con-ditions required for semiconductor process control, and additionally, has achieved a significant price reduction.

Catalog Instruction Manual


・ High accuracy and high response are achieved by the flow sen-sor with temperature-following current difference detection.
・ A normally-closed solenoid valve is employed.
・ A low leak rate is achieved by the weldless structure and metalseal.
・ The dead volume is reduced thanks to the diaphragm seat valve.
・ The face-to-face and body dimensions and the wiring tie-inpoints are designed to facilitate replacement of devices made by other companies.

Standard Specifications

Specifications relating to the flow range (e.g., flow range, accuracy and response) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.


・Air sampling
・Analyzer component
・Biotechnological process
・Burn control
・CCFL manufacturing
・Chamber pressure control
・Chemical process
・Environment monitoring
・Electronic device manufacturing
・Food production
・Fuel cell testing
・Fermentation process
・Gas blending
・Gas distribution
・Gas flow monitoring
・Gas generation
・Industrial furnace
・Leak testing
・Pharmaceutical process
・Pollution monitoring
・Process flow control
・Solar power element manufacturing
・Secondary calibration reference
・Semiconductor process
・Surface treatment process
・Thermal flame spray
・Thin film manufacturing
・Vapor deposition

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