Standard Mass Flow Controller MODEL 3660 SERIES

Standard Mass Flow Controller

Model 3660 Series Mass Flow Controller has been devel-oped centering the focus on compactness and low cost and is being acclaimed by a wide range of users for di-verse applications, including from laboratory research and development activities to the use as a standard mass flow control model for various types of analyzers and vacuum devices in the production line. Varieties of derived models and options are available.

Catalog Instruction Manual


・Equipped with an advanced flow sensor of constant-current tem-perature difference detection type to ensure high-speed response
・Use of a normally closed valve to ensure safety
・High reliability ensured using a solenoid actuator
・Low differential pressure type control available for combustible gases (LP option)

Standard Specifications

Specifications relating to the flow range (e.g., flow range, accuracy and response) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.


Air sampling
Analyzer component
Biotechnological process
Burn control
CCFL manufacturing
Chamber pressure control
Chemical process
Environment monitoring
Electronic device manufacturing
Food production
Fuel cell testing
Fermentation process
Gas blending
Gas distribution
Gas flow monitoring
Gas generation
Industrial furnace
Leak testing
Pharmaceutical process
Pollution monitoring
Process flow control
Solar power element manufacturing
Secondary calibration reference
Semiconductor process
Surface treatment process
Thermal flame spray
Thin film manufacturing
Vapor deposition

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