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High-grade Mass Flow Meter MODEL3100 SERIES

High-grade Mass Flow Meter

The Model 3100 Series Mass Flow Meter is a new, ad-vanced high-precision flowmeter developed based on the Model 3200 Series. The incorporated innovative capillary type flow sensor reduces pressure loss and ensures high response as well as ensuring stability.

Catalog Instruction Manual


・Equipped with a temperature follow-up type current difference detection flow sensor to ensure high accuracy and quick re-sponse
・Measurements of minute flows available up to 1 SCCM full scale (SR option)

Standard Specifications


・Air sampling
・Analyzer component
・Biotechnological process
・Burn control
・CCFL manufacturing
・Chamber pressure control
・Chemical process
・Environment monitoring
・Electronic device manufacturing
・Food production
・Fuel cell testing
・Fermentation process
・Gas blending
・Gas distribution
・Gas flow monitoring
・Gas generation
・Industrial furnace
・Leak testing
・Pharmaceutical process
・Pollution monitoring
・Process flow control
・Solar power element manufacturing

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