PRODUCTS
High-grade Mass Flow Meter
MODEL 3100 SERIES
■Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
■Flow range：1SCCM～20SLM
■Accuracy：±1%F.S.
- Measurement of minute flows available from F.S.1SCCM by N₂ conversion.
