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Low-cost Metal Sealed Mass Flow Controller/Meter MODEL 5400 SERIES

Low-cost Metal Sealed Mass Flow Controller/Meter

The Model 5400 Series is a successor to the Model 3440, with enhanced basic capabilities. The appearance is similar to the conventional MFC. The sensor drive system is improved: the zero-drift is further reduced and the re-sponse in the lower range is improved. The Model 5410 Series is a mass flow meter with the same body design as that of the 5400 Series.

Catalog Instruction Manual


・ Control and response in each setting range are improved.
・ The following capability to the set voltage is improved (support-ing ramping specifications).
・ As the valve is improved, the control resolution in each range is improved.

Standard Specifications

Specifications relating to the flow range (e.g., flow range, accuracy and response) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.


・Air sampling
・Analyzer component
・Biotechnological process
・Burn control
・CCFL manufacturing
・Chamber pressure control
・Chemical process
・Environment monitoring
・Electronic device manufacturing
・Food production
・Fuel cell testing
・Fermentation process
・Gas blending
・Gas distribution
・Gas flow monitoring
・Gas generation
・Industrial furnace
・Leak testing
・Pharmaceutical process
・Pollution monitoring
・Process flow control
・Solar power element manufacturing
・Secondary calibration reference
・Semiconductor process
・Surface treatment process
・Thermal flame spray
・Thin film manufacturing
・Vapor deposition

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