Low-cost Metal Sealed Mass Flow Controller/Meter MODEL 5400 SERIES
The Model 5400 Series is a successor to the Model 3440, with enhanced basic capabilities. The appearance is similar to the conventional MFC. The sensor drive system is improved: the zero-drift is further reduced and the re-sponse in the lower range is improved. The Model 5410 Series is a mass flow meter with the same body design as that of the 5400 Series.
・ Control and response in each setting range are improved.
・ The following capability to the set voltage is improved (support-ing ramping specifications).
・ As the valve is improved, the control resolution in each range is improved.
Specifications relating to the flow range (e.g., flow range, accuracy and response) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.
・Chamber pressure control
・Electronic device manufacturing
・Fuel cell testing
・Gas flow monitoring
・Process flow control
・Solar power element manufacturing
・Secondary calibration reference
・Surface treatment process
・Thermal flame spray
・Thin film manufacturing
About this commodity