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Mass flow meters and Controllers
- Standard Mass Flow Controller
MODEL 3660 SERIES - The compact & low-cost mass flow controller products
The KOFLOC Standard Mass Flow Controller MODEL 3660 SERIES is designed as a general-purpose gas mass flow controller, with focus on low-cost, versatility and customization.
KOFLOC MFC MODEL 3660 SERIES
Quick Review
•Numerous Variants
A room for customization at a reasonable cost is the description that sums up the KOFLOC Standard Mass Flow Controller MODEL 3660 SERIES. The MODEL 3660 SERIES has gained wide acceptance and solid reputation for its flexibility. It is in use throughout laboratories, universities and foundries, in both its original and customized variants.
• Low-Cost
If the cost effectiveness is the decisive factor in choosing the right mass flow controller for you application, few can compete with the KOFLOC Standard Mass Flow Controller MODEL 3660 SERIES. Its extensive menu of standardized optional features is yet another advantage in cost considerations.
• KOFLOC Dependability
KOFLOC has 60 years of experience in manufacturing precision flow instruments. KOFLOC products, both standard and off-catalog custom items are well received throughout Japan as the name that manifests confidence. KOFLOC, the fluid expert, is the name professionals trust in precision control of minute flow.
• Low Pressure Option
The KOFLOC Standard Mass Flow Controller MODEL 3660 SERIES has a standard low-pressure differential option especially suited for applications of burn control.
• Solenoid Valve
The KOFLOC Standard Mass Flow Controller MODEL 3660 SERIES utilizes the unidirectional normally closed valve with solenoid actuator to achieve higher dependability and safety.
• Standardized Dimensions and Parts
The KOFLOC Mass Flow Controller, MODEL 3660 SERIES retains the standard 3 in (76 mm) footprint, regular fittings and SEMI standard serial connector to easily replace and fit into existing gas lines without any modifications for use in widest possible applications.
•Quick Response
The KOFLOC Mass Flow Controller, MODEL 3660 SERIES is equipped with the new improved constant current thermal differential sensor for quick response of 0 ~ 100% in 2 s or less.
• Versatility
The KOFLOC Mass Flow Controller, MODEL 3660 SERIES is in use as a component for Sputter deposition, bond wiring, welding and washing equipment for semiconductor and electronic industries. It is used in scientific and analytic purpose such as in thermal analysis and vacuum equipment. The MODEL 3660 is also capable of meeting unique needs as the mass flow controller in industrial applications, including gas mixing, air sampling, burn control and more.
KOFLOC Standard Mass Flow Controller MODEL 3660 SERIES may be used for the following gases.
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Medium (gases): Actual gas calibration is available for the gas listed
Air
Argon Ar
Carbon dioxide CO2
Helium He
Hydrogen H2
Nitrogen N2
Oxygen O2
Medium (gases): N2 equivalent conversion factor (CF) is used for the gas listed. Contact KOFLOC for the availability of actual gas calibration.
Acetylene (Ethyne) C2H2
Ammonia NH3
Arsine AsH3
Boron trichloride BCl3
Boron trifluoride BF3
Butadiene (1,3-) C4H6
Butane C4H10
Butene (1-) C4H8
Butene (2-) (Cis) C4H8
Butene (2-) (Trans) C4H8
Carbonylsulfide COS
Carbon monoxide CO
Chlorine Cl2
Cyanogen C2N2
Cyclopropane C3H6
Deuterium D2
Diborane B2H6
Dichlorosilane SiH2Cl2
Dimethylamine C2H6NH
Dimethylether C2H6O
Disilane Si2H6
Ethane C2H6
Ethylene (Ethene) C2H4
Ethylchloride C2H5Cl
Freon-113 C2Cl3F3
Freon-114 C2Cl2F4
Freon-115 C2ClF5
Freon-116 C2F6
Freon-12 CCl2F2
Freon-13 CClF3
Freon-13B1 CBrF3
Freon-14 CF4
Freon-22 CHClF2
Freon-C318 C4F8
Hydrogen bromide HBr
Hydrogen chloride HCl
Hydrogen cyanide HCN
Hydrogen iodide HI
Iso-Butane C4H10
Isobutylene (Isobutene) C4H8
Krypton Kr
Methane CH4
Methylbromide CH3Br
Methylmercaptan CH3SH
Monomethylamine CH3NH2
Neon Ne
Nitric oxide NO
Nitrous oxide N2O
Ozone O3
Pentane C5H12
Phosgene COCl2
Phosphine PH3
Propane C3H8
Propylene (Propene) C3H6
Silane SiH4
Sulfur dioxide SO2
Sulfur hexafluoride SF6
Trimethylamine C3H9N
Xenon Xe
KOFLOC Standard Mass Flow Controller MODEL 3660 SERIES may NOT be used for the following gases.
Medium (gases)
Bromine pentafluoride BrF5
Carbon disulfide CS2
Chlorine trifluoride ClF3
Cyanogen chloride ClCN
Dibromo difluoromethane Br2CF2
Ethylene oxide C2H4O
Fluorine F2
Freon-11 CCl3F
Freon-21 CHCl2F
Hydrogen fluoride HF
Hydrogen sulfide H2S
Methylchloride CH3Cl
Nitrogen dioxide NO2
Nitrogen trifluoride NF3
Vinylchloride C2H3Cl
Vinylfluoride C2H3F
Note: If you did not find the right gas, please contact KOFLOC for more information.
Customization and Optional services
Numerous variants and options.
Low differential pressure model (LP option) for burn (gas) control
TOP
•Numerous Variants
A room for customization at a reasonable cost is the description that sums up the KOFLOC Standard Mass Flow Controller MODEL 3660 SERIES. The MODEL 3660 SERIES has gained wide acceptance and solid reputation for its flexibility. It is in use throughout laboratories, universities and foundries, in both its original and customized variants.
• Low-Cost
If the cost effectiveness is the decisive factor in choosing the right mass flow controller for you application, few can compete with the KOFLOC Standard Mass Flow Controller MODEL 3660 SERIES. Its extensive menu of standardized optional features is yet another advantage in cost considerations.
• KOFLOC Dependability
KOFLOC has 60 years of experience in manufacturing precision flow instruments. KOFLOC products, both standard and off-catalog custom items are well received throughout Japan as the name that manifests confidence. KOFLOC, the fluid expert, is the name professionals trust in precision control of minute flow.
• Low Pressure Option
The KOFLOC Standard Mass Flow Controller MODEL 3660 SERIES has a standard low-pressure differential option especially suited for applications of burn control.
• Solenoid Valve
The KOFLOC Standard Mass Flow Controller MODEL 3660 SERIES utilizes the unidirectional normally closed valve with solenoid actuator to achieve higher dependability and safety.
• Standardized Dimensions and Parts
The KOFLOC Mass Flow Controller, MODEL 3660 SERIES retains the standard 3 in (76 mm) footprint, regular fittings and SEMI standard serial connector to easily replace and fit into existing gas lines without any modifications for use in widest possible applications.
•Quick Response
The KOFLOC Mass Flow Controller, MODEL 3660 SERIES is equipped with the new improved constant current thermal differential sensor for quick response of 0 ~ 100% in 2 s or less.
• Versatility
The KOFLOC Mass Flow Controller, MODEL 3660 SERIES is in use as a component for Sputter deposition, bond wiring, welding and washing equipment for semiconductor and electronic industries. It is used in scientific and analytic purpose such as in thermal analysis and vacuum equipment. The MODEL 3660 is also capable of meeting unique needs as the mass flow controller in industrial applications, including gas mixing, air sampling, burn control and more.
KOFLOC Standard Mass Flow Controller MODEL 3660 SERIES may be used for the following gases.
TOP
Medium (gases): Actual gas calibration is available for the gas listed
Air
Argon Ar
Carbon dioxide CO2
Helium He
Hydrogen H2
Nitrogen N2
Oxygen O2
Medium (gases): N2 equivalent conversion factor (CF) is used for the gas listed. Contact KOFLOC for the availability of actual gas calibration.
Acetylene (Ethyne) C2H2
Ammonia NH3
Arsine AsH3
Boron trichloride BCl3
Boron trifluoride BF3
Butadiene (1,3-) C4H6
Butane C4H10
Butene (1-) C4H8
Butene (2-) (Cis) C4H8
Butene (2-) (Trans) C4H8
Carbonylsulfide COS
Carbon monoxide CO
Chlorine Cl2
Cyanogen C2N2
Cyclopropane C3H6
Deuterium D2
Diborane B2H6
Dichlorosilane SiH2Cl2
Dimethylamine C2H6NH
Dimethylether C2H6O
Disilane Si2H6
Ethane C2H6
Ethylene (Ethene) C2H4
Ethylchloride C2H5Cl
Freon-113 C2Cl3F3
Freon-114 C2Cl2F4
Freon-115 C2ClF5
Freon-116 C2F6
Freon-12 CCl2F2
Freon-13 CClF3
Freon-13B1 CBrF3
Freon-14 CF4
Freon-22 CHClF2
Freon-C318 C4F8
Hydrogen bromide HBr
Hydrogen chloride HCl
Hydrogen cyanide HCN
Hydrogen iodide HI
Iso-Butane C4H10
Isobutylene (Isobutene) C4H8
Krypton Kr
Methane CH4
Methylbromide CH3Br
Methylmercaptan CH3SH
Monomethylamine CH3NH2
Neon Ne
Nitric oxide NO
Nitrous oxide N2O
Ozone O3
Pentane C5H12
Phosgene COCl2
Phosphine PH3
Propane C3H8
Propylene (Propene) C3H6
Silane SiH4
Sulfur dioxide SO2
Sulfur hexafluoride SF6
Trimethylamine C3H9N
Xenon Xe
KOFLOC Standard Mass Flow Controller MODEL 3660 SERIES may NOT be used for the following gases.
Medium (gases)
Bromine pentafluoride BrF5
Carbon disulfide CS2
Chlorine trifluoride ClF3
Cyanogen chloride ClCN
Dibromo difluoromethane Br2CF2
Ethylene oxide C2H4O
Fluorine F2
Freon-11 CCl3F
Freon-21 CHCl2F
Hydrogen fluoride HF
Hydrogen sulfide H2S
Methylchloride CH3Cl
Nitrogen dioxide NO2
Nitrogen trifluoride NF3
Vinylchloride C2H3Cl
Vinylfluoride C2H3F
Note: If you did not find the right gas, please contact KOFLOC for more information.
Customization and Optional services
Numerous variants and options.
Low differential pressure model (LP option) for burn (gas) control
TOP
Features
Rohs compliance.
CE mark
SEMI stndard connections
SUS316 stainless steel
Unidirectional normally closed valve
Highly reliable solenoid actuator
Compact & Low-Cost
Standard dimensions and fittings for easy replacement
Free mounting position
Wide selection of fittings, seals, wetted materials and communication interfaces
Easy maintenance
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CE mark
SEMI stndard connections
SUS316 stainless steel
Unidirectional normally closed valve
Highly reliable solenoid actuator
Compact & Low-Cost
Standard dimensions and fittings for easy replacement
Free mounting position
Wide selection of fittings, seals, wetted materials and communication interfaces
Easy maintenance
TOP
Standard Specifications(3660)
| Flow range(at N2 calibration conditions) | 10 sccm to 20 slm F.S.(30 to 150slm F.S.) |
|---|---|
| Valve types* | Normally closed solenoid poppet valve |
| Control range | 2%~100%F.S(5%~100%F.S.) |
| Response | 2 sec or less to within ±2% of full scale of final value typical for 0-100% response |
| Accuracy | Within ±1.5%F.S.(Within ±2.0%F.S.) |
| Repeatability* | Within ±0.5%F.S. |
| Operating differential pressure | F.S.≤5SLM 49kPa~294kPa *Low differential pressure specification depends on types of gas and flow rates to be used. 5 |
| Proof pressure* | 980kPa |
| Leak rate* | 1X10-8 Pa.m3/s or less |
| Working temperature range | 5 to 45°C(Accuracy guaranteed within 15 to 35°C) |
| Materials of parts in contact w/gases | Body:SUS316 Valve seat:VitonTM(Optional:NeopreneTM or NBR) Seals:VitonTM(Optional:NeopreneTMor NBR) |
| Joint* | Standard;1/4SWL(3/8SWL) Optional;1/8SWL,1/4VCRTM,1/4RC,etc. |
| Electrical connections* | Dsub 9-pin male connector per KFC/SEMI stndards |
| Flow rate input signals | 0-5VDC |
| Flow rate output signals* | 0-5VDC |
| Required power supply* | +15VDC(±5%) 100mA-15VDC(±5%)200mA |
Harness Layout
Pin Assignment of Dsub 9-pin Connector per KFC Standard
| Pin No. | Signal | Pin No. | Signal |
|---|---|---|---|
| 1 | Input valve operation | 6 | Flow input Hi |
| 2 | Flow output 0-5V | 7 | Flow output COM |
| 3 | +15 VDC Power source | 8 | Flow input Lo |
| 4 | Power source COM | 9 | Output valve voltage |
| 5 | -15 VDC Power source |
* Because a differential input system is used for the product, pin 4(Power source COM)and pin 7(Flow output COM)are connected inside the mass flow controller while pin 8(Flow input Lo)is isolated. In case of a single-ended connection,connect pin 8 to pin 4.
* Values indicated in () denote the specifications for Model 3665.
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* Values indicated in () denote the specifications for Model 3665.
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Applications
Air sampling
Analyzer component
Bioreactor
Biotechnological process
Burn control
CCFL manufacturing
Chamber pressure control
Chemical process
Environment monitoring
Electronic device manufacturing
Food production
Fuel cell testing
Fermentation process
Gas blending
Gas distribution
Gas flow monitoring
Gas generation
Industrial furnace
Leak testing
Pharmaceutical process
Pollution monitoring
Process flow control
R&D
Solar power element manufacturing
Secondary calibration reference
Semiconductor process
Surface treatment process
Thermal flame spray
Thin film manufacturing
Vapor deposition
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Analyzer component
Bioreactor
Biotechnological process
Burn control
CCFL manufacturing
Chamber pressure control
Chemical process
Environment monitoring
Electronic device manufacturing
Food production
Fuel cell testing
Fermentation process
Gas blending
Gas distribution
Gas flow monitoring
Gas generation
Industrial furnace
Leak testing
Pharmaceutical process
Pollution monitoring
Process flow control
R&D
Solar power element manufacturing
Secondary calibration reference
Semiconductor process
Surface treatment process
Thermal flame spray
Thin film manufacturing
Vapor deposition
TOP
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