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Mass flow meters and Controllers
- High-grade Mass Flow Controller
MODEL 3200 SERIES - The high-performance mass flow controller products
The KOFLOC High-Grade Mass Flow Controller MODEL 3200 SERIES is the successor to the well-received 3910 SERIES. It is designed as the high-performance, industrial-grade gas mass flow controller, with focus on quick response, accuracy and adaptability. 
KOFLOC MFC MODEL 3200 SERIES
Quick Review
•CF Switching Function
The KOFLOC High-Grade Mass Flow Controller MODEL 3200 SERIES is equipped with CF switching function to offer easy way to change settings when using multiple gases.
•Clean-room Production
A class 100 clean-room production is available for the KOFLOC High-Grade Mass Flow Controller MODEL 3200 SERIES, if specified, for applications requiring extra cleanness such as CVD (Chemical Vapor Deposition) and other semiconductor processes.
•KOFLOC Dependability
KOFLOC has 60 years of experience in manufacturing precision flow instruments. KOFLOC products, both standard and off-catalog custom items are well received throughout Japan as the name that manifests confidence. KOFLOC, the fluid expert, is the name professionals trust in precision control of minute flow.
• Low Pressure & Minute Flow Models
The KOFLOC High-Grade Mass Flow Controller MODEL 3200 SERIES has a standard low-pressure differential option especially suited for applications of burn control. A special SR option is available for minute flow of 1SCCM at full-scale.
• Diaphragm Seat Valve
The KOFLOC High-Grade Mass Flow Controller MODEL 3200 SERIES utilizes the unidirectional normally closed valve with higher dependability and safety. This valve also reduces internal dead-space.
•Standardized Dimensions and Parts
The KOFLOC High-Grade Mass Flow Controller MODEL 3200 SERIES retains the standard 3 in (76 mm) footprint, regular fittings and SEMI standard serial connector to easily replace and fit into existing gas lines without any modifications for use in widest possible applications.
• Quick Response
The KOFLOC High-Grade Mass Flow Controller MODEL 3200 SERIES is equipped with the new temperature-tracing current differential sensor (P.A.F) for high accuracy at 1% F.S. or less and quick response of 0 ~ 100% in 1 s or less.
•Adaptability
The KOFLOC High-Grade Mass Flow Controller MODEL 3200 SERIES is in wide use as a component CVD, sputter deposition, bond wiring and welding for semiconductor and electronic industries. The MODEL 3200 is also used as a general-purpose mass flow controller in industrial applications of exhaust sampling, including gas mixing, air sampling, burn control and more.
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•CF Switching Function
The KOFLOC High-Grade Mass Flow Controller MODEL 3200 SERIES is equipped with CF switching function to offer easy way to change settings when using multiple gases.
•Clean-room Production
A class 100 clean-room production is available for the KOFLOC High-Grade Mass Flow Controller MODEL 3200 SERIES, if specified, for applications requiring extra cleanness such as CVD (Chemical Vapor Deposition) and other semiconductor processes.
•KOFLOC Dependability
KOFLOC has 60 years of experience in manufacturing precision flow instruments. KOFLOC products, both standard and off-catalog custom items are well received throughout Japan as the name that manifests confidence. KOFLOC, the fluid expert, is the name professionals trust in precision control of minute flow.
• Low Pressure & Minute Flow Models
The KOFLOC High-Grade Mass Flow Controller MODEL 3200 SERIES has a standard low-pressure differential option especially suited for applications of burn control. A special SR option is available for minute flow of 1SCCM at full-scale.
• Diaphragm Seat Valve
The KOFLOC High-Grade Mass Flow Controller MODEL 3200 SERIES utilizes the unidirectional normally closed valve with higher dependability and safety. This valve also reduces internal dead-space.
•Standardized Dimensions and Parts
The KOFLOC High-Grade Mass Flow Controller MODEL 3200 SERIES retains the standard 3 in (76 mm) footprint, regular fittings and SEMI standard serial connector to easily replace and fit into existing gas lines without any modifications for use in widest possible applications.
• Quick Response
The KOFLOC High-Grade Mass Flow Controller MODEL 3200 SERIES is equipped with the new temperature-tracing current differential sensor (P.A.F) for high accuracy at 1% F.S. or less and quick response of 0 ~ 100% in 1 s or less.
•Adaptability
The KOFLOC High-Grade Mass Flow Controller MODEL 3200 SERIES is in wide use as a component CVD, sputter deposition, bond wiring and welding for semiconductor and electronic industries. The MODEL 3200 is also used as a general-purpose mass flow controller in industrial applications of exhaust sampling, including gas mixing, air sampling, burn control and more.
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Features
Rohs compliance
High-lift actuator for large flows
Single 24 VDC power source
Choice of RS232C or RS485 interface
Standard totalizer function
14-bit converter for 4-1/2-digit display and operation
Isolated thermal sensor for measuring inflammable gases
Choice of SUS316L or SUS316 stainless steel
Standard dimensions and fittings for easy replacement
Free mounting position
SV setting, plus 5 pattern settings
Auto-zero function
Wide selection of fittings, seals, wetted materials and communication interfaces
Easy maintenance
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High-lift actuator for large flows
Single 24 VDC power source
Choice of RS232C or RS485 interface
Standard totalizer function
14-bit converter for 4-1/2-digit display and operation
Isolated thermal sensor for measuring inflammable gases
Choice of SUS316L or SUS316 stainless steel
Standard dimensions and fittings for easy replacement
Free mounting position
SV setting, plus 5 pattern settings
Auto-zero function
Wide selection of fittings, seals, wetted materials and communication interfaces
Easy maintenance
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Standard Specifications
| Flow range(at N2 calibration conditions) | 10 sccm to 20 slm |
|---|---|
| Valve type | Normally closed solenoid diaphragm seat valve |
| Control range | 2%~100%F.S. |
| Response | 1 sec. or less to within±2% of full scale of final value typical for 0-100% response |
| Accuracy | Within±1.0%F.S. |
| Linearity | Within±0.5%F.S. |
| Repeatability | Within±0.2%F.S. |
| Operating differential pressure | F.S.≤5SLM 49kPa~294kPa *Low differential pressure specification depends on types of gas and flow rates to be used. 5 |
| Proof pressure | 980kPa |
| Leak rate | 1X10-8 Pa.m3/s or less |
| Working temperature range | 0 to 50°C(Accuracy guarantee;0 to 50°C) |
| Materials of parts in contact w/gases | Body:SUS316L Diaphram:SUS316 Valve seat:PTFE Seals:VitonTM(Optional:NeopreneTM or NBR) |
| Joint | Standard:1/4SWL Optional:1/8SWL,1/4VCRTM,1/4RC,etc. |
| Electrical connections* | Dsub 9-pin male connector per KFC standard(SEMI standard) |
| Flow rate input signals | 0~5VDC |
| Flow rate output signals* | 0~5VDC |
| Required power supply* | +15VDC(±5%) 100mA,-15VDC(±5%) 200mA |
Harness Layout
Pin assignment of Dsub 9-pin Connector per KFC Standard
| Pin no. | Signal | Pin No. | Signal |
|---|---|---|---|
| 1 | Input valve operation | 6 | Flow input Hi |
| 2 | Flow output 0-5V | 7 | Flow output COM |
| 3 | +15 VDC Power source | 8 | Flow input Lo |
| 4 | Power source COM | 9 | NC |
| 5 | -15 VDC Power source |
* Because a differential input system is used for the product,pin 4(Power source COM) and pin 7(Flow output COM)are connected inside the mass flow controller while pin 8(Flow input Lo)is isolated. In case of a single-ended connection,connect pin 8 to pin 4.
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Applications
Air sampling
Analyzer component
Bioreactor
Biotechnological process
Burn control
CCFL manufacturing
Chamber pressure control
Chemical process
Environment monitoring
Electronic device manufacturing
Food production
Fuel cell testing
Fermentation process
Gas blending
Gas distribution
Gas flow monitoring
Gas generation
Industrial furnace
Leak testing
Pharmaceutical process
Pollution monitoring
Process flow control
R&D
Solar power element manufacturing
KOFLOC Mass Flow Controller / Meter with Indicator MODEL 8300 SERIES may be used for the following gases.
Medium (gases): Actual gas calibration is available for the gas listed
Air
Argon Ar
Carbon dioxide CO2
Helium He
Hydrogen H2
Nitrogen N2
Oxygen O2
Medium (gases): N2 equivalent conversion factor (CF) is used for the gas listed. Contact KOFLOC for the availability of actual gas calibration.
Acetylene (Ethyne) C2H2
Ammonia NH3
Arsine AsH3
Boron trichloride BCl3
Boron trifluoride BF3
Butadiene (1,3-) C4H6
Butane C4H10
Butene (1-) C4H8
Butene (2-) (Cis) C4H8
Butene (2-) (Trans) C4H8
Carbonylsulfide COS
Carbon monoxide CO
Chlorine Cl2
Cyanogen C2N2
Cyclopropane C3H6
Deuterium D2
Diborane B2H6
Dichlorosilane SiH2Cl2
Dimethylamine C2H6NH
Dimethylether C2H6O
Disilane Si2H6
Ethane C2H6
Ethylene (Ethene) C2H4
Ethylchloride C2H5Cl
Freon-113 C2Cl3F3
Freon-114 C2Cl2F4
Freon-115 C2ClF5
Freon-116 C2F6
Freon-12 CCl2F2
Freon-13 CClF3
Freon-13B1 CBrF3
Freon-14 CF4
Freon-22 CHClF2
Freon-C318 C4F8
Hydrogen bromide HBr
Hydrogen chloride HCl
Hydrogen cyanide HCN
Hydrogen iodide HI
Iso-Butane C4H10
Isobutylene (Isobutene) C4H8
Krypton Kr
Methane CH4
Methylbromide CH3Br
Methylmercaptan CH3SH
Monomethylamine CH3NH2
Neon Ne
Nitric oxide NO
Nitrous oxide N2O
Ozone O3
Pentane C5H12
Phosgene COCl2
Phosphine PH3
Propane C3H8
Propylene (Propene) C3H6
Silane SiH4
Sulfur dioxide SO2
Sulfur hexafluoride SF6
Trimethylamine C3H9N
Xenon Xe
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KOFLOC Mass Flow Controller / Meter with Indicator MODEL 8300 SERIES may NOT be used for the following gases.
Medium (gases)
Bromine pentafluoride BrF5
Carbon disulfide CS2
Chlorine trifluoride ClF3
Cyanogen chloride ClCN
Dibromo difluoromethane Br2CF2
Ethylene oxide C2H4O
Fluorine F2
Freon-11 CCl3F
Freon-21 CHCl2F
Hydrogen fluoride HF
Hydrogen sulfide H2S
Methylchloride CH3Cl
Nitrogen dioxide NO2
Nitrogen trifluoride NF3
Vinylchloride C2H3Cl
Vinylfluoride C2H3F
Note: If you did not find the right gas, please contact KOFLOC for more information.
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Analyzer component
Bioreactor
Biotechnological process
Burn control
CCFL manufacturing
Chamber pressure control
Chemical process
Environment monitoring
Electronic device manufacturing
Food production
Fuel cell testing
Fermentation process
Gas blending
Gas distribution
Gas flow monitoring
Gas generation
Industrial furnace
Leak testing
Pharmaceutical process
Pollution monitoring
Process flow control
R&D
Solar power element manufacturing
KOFLOC Mass Flow Controller / Meter with Indicator MODEL 8300 SERIES may be used for the following gases.
Medium (gases): Actual gas calibration is available for the gas listed
Air
Argon Ar
Carbon dioxide CO2
Helium He
Hydrogen H2
Nitrogen N2
Oxygen O2
Medium (gases): N2 equivalent conversion factor (CF) is used for the gas listed. Contact KOFLOC for the availability of actual gas calibration.
Acetylene (Ethyne) C2H2
Ammonia NH3
Arsine AsH3
Boron trichloride BCl3
Boron trifluoride BF3
Butadiene (1,3-) C4H6
Butane C4H10
Butene (1-) C4H8
Butene (2-) (Cis) C4H8
Butene (2-) (Trans) C4H8
Carbonylsulfide COS
Carbon monoxide CO
Chlorine Cl2
Cyanogen C2N2
Cyclopropane C3H6
Deuterium D2
Diborane B2H6
Dichlorosilane SiH2Cl2
Dimethylamine C2H6NH
Dimethylether C2H6O
Disilane Si2H6
Ethane C2H6
Ethylene (Ethene) C2H4
Ethylchloride C2H5Cl
Freon-113 C2Cl3F3
Freon-114 C2Cl2F4
Freon-115 C2ClF5
Freon-116 C2F6
Freon-12 CCl2F2
Freon-13 CClF3
Freon-13B1 CBrF3
Freon-14 CF4
Freon-22 CHClF2
Freon-C318 C4F8
Hydrogen bromide HBr
Hydrogen chloride HCl
Hydrogen cyanide HCN
Hydrogen iodide HI
Iso-Butane C4H10
Isobutylene (Isobutene) C4H8
Krypton Kr
Methane CH4
Methylbromide CH3Br
Methylmercaptan CH3SH
Monomethylamine CH3NH2
Neon Ne
Nitric oxide NO
Nitrous oxide N2O
Ozone O3
Pentane C5H12
Phosgene COCl2
Phosphine PH3
Propane C3H8
Propylene (Propene) C3H6
Silane SiH4
Sulfur dioxide SO2
Sulfur hexafluoride SF6
Trimethylamine C3H9N
Xenon Xe
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KOFLOC Mass Flow Controller / Meter with Indicator MODEL 8300 SERIES may NOT be used for the following gases.
Medium (gases)
Bromine pentafluoride BrF5
Carbon disulfide CS2
Chlorine trifluoride ClF3
Cyanogen chloride ClCN
Dibromo difluoromethane Br2CF2
Ethylene oxide C2H4O
Fluorine F2
Freon-11 CCl3F
Freon-21 CHCl2F
Hydrogen fluoride HF
Hydrogen sulfide H2S
Methylchloride CH3Cl
Nitrogen dioxide NO2
Nitrogen trifluoride NF3
Vinylchloride C2H3Cl
Vinylfluoride C2H3F
Note: If you did not find the right gas, please contact KOFLOC for more information.
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Customization and Optional services
Low differential pressure option (LP option) for burn (gas) control
Minute flow model (SR option) with F.S. of 1SCCM
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Minute flow model (SR option) with F.S. of 1SCCM
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