KOFLOC A Scientific Approach for Fluids

Quick Review

•CF Switching Function
The KOFLOC High-Grade Mass Flow Meter MODEL 3100 SERIES is equipped with CF switching function to offer easy way to change settings when using multiple gases.

• Clean-Room Production
A class 100 clean-room production is available for the KOFLOC High-Grade Mass Flow Meter MODEL 3100 SERIES, if specified, for applications requiring extra cleanness such as CVD (Chemical Vapor Deposition) and other semiconductor processes.

• Low Pressure & Minute Flow Models
The KOFLOC High-Grade Mass Flow Meter MODEL 3100 SERIES has a standard minute flow variant, SR option, and is available for minute flow of 1SCCM at full-scale.

• KOFLOC DependabilityKOFLOC has 60 years of experience in manufacturing precision flow instruments. KOFLOC products, both standard and off-catalog custom items are well received throughout Japan as the name that manifests confidence. KOFLOC, the fluid expert, is the name professionals trust in precision control of minute flow.

• Standardized Dimensions and Parts
The KOFLOC High-Grade Mass Flow Meter MODEL 3100 SERIES retains the standard 3 in (76 mm) footprint, regular fittings and SEMI standard serial connector to easily replace and fit into existing gas lines without any modifications for use in widest possible applications.

• Quick Response
The KOFLOC High-Grade Mass Flow Meter MODEL 3100 SERIES is equipped with the new temperature-tracing current differential sensor (P.A.F) for high accuracy at 1% F.S. or less and quick response of 0 ~ 100% in 1 s or less.

•Adaptability
The KOFLOC High-Grade Mass Flow Meter MODEL 3100 SERIES is in wide use as a component in CVD, sputter deposition, bond wiring and welding for semiconductor and electronic industries. The MODEL 3100 is also used as a general-purpose mass flow meter in multiple industrial applications.

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The KOFLOC High-Grade Mass Flow Meter MODEL 3100 SERIES may be used for the following gases.
Medium (gases): Actual gas calibration is available for the gas listed
Air
Argon Ar
Carbon dioxide CO2
Helium He
Hydrogen H2
Nitrogen N2
Oxygen O2
Medium (gases): N2 equivalent conversion factor (CF) is used for the gas listed. Contact KOFLOC for the availability of actual gas calibration.
Acetylene (Ethyne) C2H2
Ammonia NH3
Arsine AsH3
Boron trichloride BCl3
Boron trifluoride BF3
Butadiene (1,3-) C4H6
Butane C4H10
Butene (1-) C4H8
Butene (2-) (Cis) C4H8
Butene (2-) (Trans) C4H8
Carbonylsulfide COS
Carbon monoxide CO
Chlorine Cl2
Cyanogen C2N2
Cyclopropane C3H6
Deuterium D2
Diborane B2H6
Dichlorosilane SiH2Cl2
Dimethylamine C2H6NH
Dimethylether C2H6O
Disilane Si2H6
Ethane C2H6
Ethylene (Ethene) C2H4
Ethylchloride C2H5Cl
Freon-113 C2Cl3F3
Freon-114 C2Cl2F4
Freon-115 C2ClF5
Freon-116 C2F6
Freon-12 CCl2F2
Freon-13 CClF3
Freon-13B1 CBrF3
Freon-14 CF4
Freon-22 CHClF2
Freon-C318 C4F8
Hydrogen bromide HBr
Hydrogen chloride HCl
Hydrogen cyanide HCN
Hydrogen iodide HI
Iso-Butane C4H10
Isobutylene (Isobutene) C4H8
Krypton Kr
Methane CH4
Methylbromide CH3Br
Methylmercaptan CH3SH
Monomethylamine CH3NH2
Neon Ne
Nitric oxide NO
Nitrous oxide N2O
Ozone O3
Pentane C5H12
Phosgene COCl2
Phosphine PH3
Propane C3H8
Propylene (Propene) C3H6
Silane SiH4
Sulfur dioxide SO2
Sulfur hexafluoride SF6
Trimethylamine C3H9N
Xenon Xe

The KOFLOC High-Grade Mass Flow Meter MODEL 3100 SERIES may NOT be used for the following gases.
Medium (gases)
Bromine pentafluoride BrF5
Carbon disulfide CS2
Chlorine trifluoride ClF3
Cyanogen chloride ClCN
Dibromo difluoromethane Br2CF2
Ethylene oxide C2H4O
Fluorine F2
Freon-11 CCl3F
Freon-21 CHCl2F
Hydrogen fluoride HF
Hydrogen sulfide H2S
Methylchloride CH3Cl
Nitrogen dioxide NO2
Nitrogen trifluoride NF3
Vinylchloride C2H3Cl
Vinylfluoride C2H3F
Note: If you did not find the right gas, please contact KOFLOC for more information.

Customization and Optional services
Minute flow model (SR option) with F.S. of 1SCCM


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Rohs compliance
Standard totalizer function
Choice of SUS316L or SUS316 stainless steel
Standard dimensions and fittings for easy replacement
Free mounting position
Wide selection of fittings, seals, wetted materials and communication interfaces
Easy maintenance

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Air sampling
Analyzer component
Bioreactor
Biotechnological process
Burn control
CCFL manufacturing
Chamber pressure control
Chemical process
Environment monitoring
Electronic device manufacturing
Food production
Fuel cell testing
Fermentation process
Gas blending
Gas distribution
Gas flow monitoring
Gas generation
Industrial furnace
Leak testing
Pharmaceutical process
Pollution monitoring
Process flow control
R&D
Solar power element manufacturing

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