PRODUCTS
High Grade Metal Seal Mass Flow Controller
MODEL 5100 SERIES
■Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
■Flow range：1SCCM～20SLM
■Accuracy：±1%F.S.
- Metal seals.
- Control of minute flows available from F.S.1SCCM by N₂ conversion.
- Reduced dead volume thanks to the diaphragm seat valve.
