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High-grade Mass Flow Controller MODEL 3200 SERIES

High-grade Mass Flow Controller

Model 3200 Series Mass Flow Controller is an advanced model designed as a successor of the 3910 Series that enjoys a wide use for diverse applications such as manu-facture of semiconductors, LCDs, combustion equipment, analytical devices, and biotechnology fields. Its high per-formance is equal to a new standard of KOFLOC.

Catalog Instruction Manual

Features

・Equipped with a temperature follow-up type current difference detection flow sensor (patent applied for) to ensure high accu-racy and high-speed response
・Use of a normally closed valve to ensure safety
・Reduced dead volume thanks to the diaphragm seat valve
・Control of small quantities of flows available up to 1 SCCM fullscale (SR option)
・Low differential pressure type control available for combustiblegases (LP option)

Standard Specifications


!!Note !!
Specifications relating to the flow range (e.g., flow range, accuracy and re-sponse) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.

Applications

Air sampling
Analyzer component
Bioreactor
Biotechnological process
Burn control
CCFL manufacturing
Chamber pressure control
Chemical process
Environment monitoring
Electronic device manufacturing
Food production
Fuel cell testing
Fermentation process
Gas blending
Gas distribution
Gas flow monitoring
Gas generation
Industrial furnace
Leak testing
Pharmaceutical process
Pollution monitoring
Process flow control
R&D
Solar power element manufacturing

About this commodity

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