Top Page > Product Information > Mass flow meters and Controllers > Digital Mass Flow SensorMODEL D7100
Mass flow meters and Controllers
- Digital Mass Flow Sensor
MODEL D7100 - Unlike the MODEL 7100NL, the MODEL D7100 uses a digital circuit for high-precision temperature compensation
and high-precision linearization compensation.
Characterized by high-precision operation and low voltage
operation at 5 VDC, this model can be used for diverse
applications. 
Features
• Equipped with a chip type thermal sensor developed using the
film forming technology and MEMS technology
• 300 msec high-speed detection of change in fl ow rate
• Single low supply voltage drive; 5 VDC driving
• High-precision temperature compensation and high-precision
linearization compensation by digital circuit
film forming technology and MEMS technology
• 300 msec high-speed detection of change in fl ow rate
• Single low supply voltage drive; 5 VDC driving
• High-precision temperature compensation and high-precision
linearization compensation by digital circuit
Standard Specifi cations
| Flow range (F.S.) (at N2 calibration conditions) | 200SCCM | 1SLM, 5SLM, 10SLM, 20SLM | |
| Object gas | Air, N2, Ar | ||
| Sensor | Chip sensor | ||
| Main specifi cations | Measuring range | 2-100% | |
| Response | 300msec | ||
| Accuracy | ±1% F.S. or less (temperature effect error and linearity error included) | ||
| Pressure characteristics | 0.4%F.S./100kPa or less | ||
| Repeatability | ±0.5%F.S. | ||
| Pressure | Pressure loss | 5kPa or less | |
| Operating pressure range | 0-700kPa | ||
| Proof pressure | 980kPa | ||
| Temperature | Standard temperature | 20°C | |
| Allowable operating temperature range | +5°C-+45°C | ||
| Allowable storage temperature range | -10°C-+60°C | ||
| Humidity | Allowable operating humidity range | 10-90%RH (Dew condensation not allowed.) | |
| Flow output signal | DC0.5-3.0V | ||
| Required power | 5 VDC (±5%); power consumption: 20 mA | ||
| Applicable standards | RoHS compliant | ||
| Materials of parts in contact with gases | Aluminum, Viton, PC resin, PTFE | ||
| Joint | 9/16-18UNF | ||
About this commodity
