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Mass flow meters and Controllers
- Digital Mass Flow Controller
MODEL D3660 SE RIES - Based on the analog Model 3660, the sensor has been
made into a high-accuracy digital type.
The accuracy and response have been improved exponentially as compared with conventional models, and this model has diverse functions. 
Features
• The built-in microprocessor ensures highly-functional operation.
• Electric interchangeability with conventional models (analog)
• The general-purpose communication function is provided as
standard. (RS232C/RS485-compatible)
• Device No. can be set.
• High-precision operation with high-resolution (14 bits or more)
AD and DA
• Excellent stability
• A variety of functions by command operation
(Pattern setting, time axis pattern setting, etc.)
• Auto-zero function
• Electric interchangeability with conventional models (analog)
• The general-purpose communication function is provided as
standard. (RS232C/RS485-compatible)
• Device No. can be set.
• High-precision operation with high-resolution (14 bits or more)
AD and DA
• Excellent stability
• A variety of functions by command operation
(Pattern setting, time axis pattern setting, etc.)
• Auto-zero function
Standard Specifi cations
| Flow rate (at N2 calibration condition) | 10SCCM-20SLM | ||
| Sensor | Thermal mass fl ow sensor | ||
| Valve actuator | Normally closed solenoid valve actuator | ||
| Valve type | Poppet valve | ||
| Control system | Control range | 2%–100% F.S. | |
| Response | Setting: 6-100% of F.S. ··· Within 1 sec. for setting ±2% Setting: 2-5% of F.S. ··· Within 3 sec. for setting ±2% | ||
| Accuracy | Within ±1.0% F.S.(@20°C) | ||
| Repeatability | Within ±0.2% F.S.(@20°C) | ||
| Pressure | Proof pressure | 0.98MPa | |
| Operating differential pressure | FS<=5SLM 49-294kPa 5 | ||
| Temperature | Operating temp. | 0°C-50°C | |
| Accuracy guaranteed temp. | 15°C-35°C ±0.05% F.S./°C | ||
| Humidity | Allowable operating humidity | 10%–90% (No condensation) | |
| Instrumentation | Flow rate output signals: Analog | Input/output signals: 0-5VDC | |
| Flow rate input signals: Analog | Input/output signals: 0-5VDC | ||
| Communication | Communication type | RS485: Communication speed 9600 bps | |
| Connector | 6-pin modular jack | ||
| Power supply | Rating | +15VDC: 100mA -15VDC: 200mA | |
| Allowable supply voltage range | ±15VDC: ±10% (Ripple 5%) | ||
| Electrical connections | Dsub 9-pin male connector per KFC standards | ||
| Materials of parts in contact with gases | SUS316L, SUS316, PTFE, fl uoro-rubber, or chloroprene rubber (option) | ||
| Joint | 1/4Rc, 1/4SWL®, 1/4VCR® | ||
| Mounting position | No specifi cation | ||
| Weight | Approx. 800 g | ||
* Select the input/output signal when placing an order for (1) 0-5V and (2) 4-20 mA.
* Select the communication type RS232C or RS485 when placing an order.
* The described contents are subject to change.
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* Select the communication type RS232C or RS485 when placing an order.
* The described contents are subject to change.
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About this commodity
