Top Page > Product Information > Mass flow meters and Controllers > Chip Sensor-equipped Mass Flow MeterMODEL 7800
Mass flow meters and Controllers
- Chip Sensor-equipped Mass Flow Meter
MODEL 7800 - NEW!!!
UPCOMING!
The Model 7800 is a general-purpose mass flow meter
equipped with a newly developed chip type thermal sensor.
Maintaining the quick response and high repeatability of
the chip type thermal sensor, this model is suitable for use
with wide-ranging flow rates and application in various
fi elds. 
Features
• Equipped with a chip type thermal sensor developed using fi lm
forming technology and MEMS technology
• Realization of quick response and high repeatability
• Flow output signal changeover (0-5 V; 4-20 mA)
• Single supply voltage; 24 VDC driving
• Ideal for mounting on portable gas analyzers.
forming technology and MEMS technology
• Realization of quick response and high repeatability
• Flow output signal changeover (0-5 V; 4-20 mA)
• Single supply voltage; 24 VDC driving
• Ideal for mounting on portable gas analyzers.
Differences between the MODEL 7800 and conventional products
Conventional coil sensors are made by winding sensor coils of 20 μm in outer diameter around two locations on the
upstream and downstream sides of a stainless steel pipe having an outer diameter of 0.4φ and inner diameter of 0.3φ
in order to maintain the coil temperature.
The rough structure of the representative mass fl ow meter equipped with such a sensor is shown in Structural Drawing 1 below.
The MODEL 7800 newly developed this time is equipped with a semiconductor micro sensor developed using MEMS
technology, having a through-fl ow space (no structure) inside to drastically reduce the generation of foreign particles.
The structure of the new MODEL 7800 is shown in Structural Drawing 2 below.
upstream and downstream sides of a stainless steel pipe having an outer diameter of 0.4φ and inner diameter of 0.3φ
in order to maintain the coil temperature.
The rough structure of the representative mass fl ow meter equipped with such a sensor is shown in Structural Drawing 1 below.
The MODEL 7800 newly developed this time is equipped with a semiconductor micro sensor developed using MEMS
technology, having a through-fl ow space (no structure) inside to drastically reduce the generation of foreign particles.
The structure of the new MODEL 7800 is shown in Structural Drawing 2 below.
Standard Specifi cations
| Flow range (F.S.) | 500SCCM, 1SLM,10SLM | 50SLM, 100SLM | 300SLM | 500SLM, 1000SLM | |
| Object gas | Air,N²,Ar,He,H²,CO² | Air,N² | |||
| Sensor | Chip sensor | ||||
| Main specifi -cations | Measuring range | 2-100% | 5-100% | ||
| Response | 300msec | 500msec | 1sec | ||
| Accuracy(20°C) | ±1%F.S. | ±2%F.S. | ±3%F.S. | ±5%F.S. | |
| Temperature characteristics | 0.2%/°C (15-35°C) | ||||
| Pressure | Proof pressure | 0.98MPa | |||
| Temperature | Standard temperature | 20°C | |||
| Allowable operating temperature range | 0°C+50°C | ||||
| Allowable storage temperature range | -10°C+60°C | ||||
| Humidity | Allowable operating humidity range | 10-90%RH (Dew condensation not allowed.) | |||
| Flow output | Analog output | 4-20mA/DC0-5V | |||
| Power supply | Rating | 24 VDC; power consumption: 100 mA | |||
| Allowable supply voltage range | 24 V ±10% (Ripple : 5%) | ||||
| Applicable standards | RoHS and CE Marking compliant | ||||
| Materials of parts in contact with gases | SUS303, Viton, resin | ||||
| Joint | 1/4 F900,3/8 F900 | 1/2 F900,1 F900 | |||
| Weight | 600g | 800g | 1200g | ||
About this commodity
