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Mass flow meters and Controllers
- Super-Compact Mass Flow Controller
MODEL 7200MC - The MODEL 7200MC is an ultimately downsized model
equipped with a newly-developed chip type thermal sensor.
Compared with conventional products, this new type flow
meter ensures substantially improved response and repeatability. 
Features
• Equipped with a chip type thermal sensor developed using film
forming technology and MEMS technology
• Realization of quick response and high repeatability
• Flow setting input and flow output signal changeover (0-5 V;4-20 mA)
• Single supply voltage; 24 VDC driving
• Ideal for mounting on portable gas analyzers
forming technology and MEMS technology
• Realization of quick response and high repeatability
• Flow setting input and flow output signal changeover (0-5 V;4-20 mA)
• Single supply voltage; 24 VDC driving
• Ideal for mounting on portable gas analyzers
Standard Specifi cations
| Valve type | Proportion solenoid | |||
| Valve operation | Normally closed (N.C.) | |||
| Flow range (F.S.) | 50SCCM,500SCCM | 5SLM,10SLM | 20SLM | |
| Object gas | Air,N²,Ar,He,H²,CO² | |||
| Sensor | Chip sensor | |||
| Control system | Control range | 2-100% | ||
| Response | 1sec | |||
| Accuracy (20°C) | ±1%F.S. | ±2%F.S. | ||
| Repeatability | 0.2%F.S. | |||
| Temperature coefficient | 0.2%/°C (15-35°C) | |||
| Pressure | Standard differential pressure | 500 kPa (Inlet : 500 kPa ; outlet : 0 kPa) gauge pressure | ||
| Operating differential pressure range | L : 150-400kPa,M : 350-650kPa,H : 600-900kPa | |||
| Proof pressure | 980kPa | |||
| Temperature | Standard temperature | 20°C | ||
| Allowable operating temperature range | 0°C-+50°C | |||
| Allowable storage temperature range | -10°C-+60°C | |||
| Humidity | Allowable operating humidity range | 10-90%RH (Dew condensation not allowed.) | ||
| Flow rate signal | Analog input | 4-20mA : DC0-5V | ||
| Analog output | 4-20mA : DC0-5V | |||
| Power supply | Rating | 24 VDC; power consumption: 350 mA | ||
| Allowable supply voltage range | 24 V ±10% (Ripple: 5%) | |||
| Applicable standards | RoHS and CE Marking compliant | |||
| Materials of parts in contact with gases | Brass, NBR, resin, SUS | |||
| Joint | RC 1/4 | |||
| Weight | 800g | 800g | 1000g | |
Cable Connections
Dsub 9-pin, male
| Pin No. | Signal name | Pin No. | Signal name |
| 1 | Forced open-close input | 6 | Flow setting signal input |
| 2 | Flow signal output | 7 | Flow rate signal output: COM |
| 3 | Power 24 V input | 8 | Flow setting signal input: COM |
| 4 | Power: COM | 9 | NC |
| 5 | NC |
About this commodity
